Teacher: Professor David Elata
|1|| Course overview and rules, short introduction to MEMS.
Overview of microfabrication processes: photolithography, patterning, etching, deposition, sacrificial layers, lift-off, deep wet and dry etching, DRIE.
|Process flow SOI.|
|2||Electrostatics: electric field, electric displacement, boundary conditions. Electrostatic actuation, energy method, model of the parallel-plates actuator: charge and voltage control, stability.||Tilt plate actuator.|
|3||Electrostatic actuation: comb-drive actuators. One-sided and double-sided actuators. Bifurcation of the symmetric parallel-plates system.||Angular comb-drive.|
|4||Flexures. The Euler-Bernoulli beam equation. Clamped-Clamped beam suspensions.||Nonlinear response of the clamped-clamped beam suspension.|
|5||Folded-beam suspension, Silicon as a mechanical material||Electrostatic bifurcation of a single comb finger.|
|6||Fringing fields and levitation in comb-drives. Side pull-in.||Introduction of layout tool.|
|7||Stresses in thin layers. Curling and buckling, passive test devices.||Mid-term exam.|
|8||Thermoelastic actuation. Heat conduction in a 1-D bar. Bi-morph, hot-cold arm, and chevron actuators.||Chevron actuator.|
|9||Electric fields in dielectric layers. Capacitive RF switch.||Dielectric comb-drive.|
|10||Piezoelectric Transduction. Direct and converse effects. Physical explanation. Transduction efficiency.||1D linear resonator.|
|11||Piezoelectric Transduction continued.||Vibration of the cantilever beam.|
|12||Electrostatic resonators. Quality factor. Ring and disk resonators and oscillators.||Dynamic response of the folded-beam suspension|
|13||Dynamic response of electrostatic actuators. Discussion of advanced topics.||Review of course material.|